Patents/Inventors

Anupam Mitra

Yokkaichi MieJP5 patents

4 Patents

US125108332025
Imprint Apparatus, Pattern Forming Method, and Method of Manufacturing Semiconductor Device
KIOXIA CORPORATION
0 cites
US118529852023
Imprint Method, Imprint Apparatus, and Film Formation Apparatus
KIOXIA CORPORATION
0 cites
US117622852023
Template, Patterning Method, and Method for Manufacturing Semiconductor Device
Kioxia Corporation
0 cites
US116690112023
Template, Template Manufacturing Method, and Semiconductor Device Manufacturing Method
KIOXIA CORPORATION
0 cites