Antonius Franciscus Johannes De Groot

6 Patents

• US123157562025

  Method of Manufacturing a Substrate Support for a Lithographic Apparatus, Substrate Table, Lithographic Apparatus, Device Manufacturing Method, Method of Use

  ASML NETHERLANDS B.V.

  0 cites
• US121177262024

  Pellicle and Pellicle Assembly

  ASML NETHERLANDS B.V.

  0 cites
• US120323012024

  Substrate Support, Lithographic Apparatus and Loading Method

  ASML NETHERLANDS B.V.

  0 cites
• US118746072024

  Method for Providing a Wear-resistant Material on a Body, and Composite Body

  ASML NETHERLANDS B.V.

  0 cites
• US117549182023

  Pellicle and Pellicle Assembly

  ASML NETHERLANDS B.V.

  0 cites
• US115560632023

  Substrate Support, Lithographic Apparatus and Loading Method

  ASML Netherlands B.V.

  0 cites