Patents/Inventors

Antonio Arion Gellineau

Santa Clara, CAUS5 patents

6 Patents

US123600622025
Methods and Systems for Regularizing the Optimization of Application Specific Semiconductor Measurement System Parameter Settings
KLA Corporation
0 cites
US123207632025
Full Beam Metrology for X-ray Scatterometry Systems
KLA Corporation
0 cites
US120190302024
Methods and Systems for Targeted Monitoring of Semiconductor Measurement Quality
KLA Corporation
0 cites
US119903802024
Methods and Systems for Combining X-ray Metrology Data Sets to Improve Parameter Estimation
KLA Corporation
0 cites
US119553912024
Process Monitoring of Deep Structures with X-ray Scatterometry
Kla-tencor Corporation
0 cites
US116982512023
Methods and Systems for Overlay Measurement Based on Soft X-ray Scatterometry
KLA Corporation
0 cites