Patents/Inventors

Anton Devilliers

Clifton Park, NYUS18 patents

15 Patents

US125573922026
Highly Regular Logic Design for Efficient 3D Integration
Tokyo Electron Limited
0 cites
US125123562025
Apparatus and Method for Wafer Alignment
Tokyo Electron Limited
0 cites
US125060192025
Wafer Chuck Designs and Methods for Retaining a Processing Liquid on a Surface of a Semiconductor Wafer
Tokyo Electron Limited
0 cites
US123811182025
3D Multiple Location Compressing Bonded Arm for Advanced Integration
Tokyo Electron Limited
0 cites
US123549912025
Replacement Buried Power Rail in Backside Power Delivery
Tokyo Electron Limited
0 cites
US123362742025
Self-aligned Method for Vertical Recess for 3D Device Integration
Tokyo Electron Limited
0 cites
US120992992024
Method of Patterning a Substrate Using a Sidewall Spacer Etch Mask
Tokyo Electron Limited
0 cites
US120149842024
Method of Manufacturing a Semiconductor Apparatus Having Stacked Devices
Tokyo Electron Limited
0 cites
US118482362023
Method for Recessing a Fill Material Within Openings Formed on a Patterned Substrate
Tokyo Electron Limited
0 cites
US117823462023
Method of Patterning a Substrate Using a Sidewall Spacer Etch Mask
Tokyo Electron Limited
0 cites
US117768082023
Planarization of Spin-on Films
TOKYO ELECTRON LIMITED
0 cites
US117641132023
Method of 3D Logic Fabrication to Sequentially Decrease Processing Temperature and Maintain Material Thermal Thresholds
Tokyo Electron Limited
0 cites
US117355252023
Power Delivery Network for CFET with Buried Power Rails
TOKYO ELECTRON LIMITED
0 cites
US117215822023
Method of Making 3D Circuits with Integrated Stacked 3D Metal Lines for High Density Circuits
Tokyo Electron Limited
0 cites
US115748452023
Apparatus and Method for Simultaneous Formation of Diffusion Break, Gate Cut, and Independent N and P Gates for 3D Transistor Devices
TOKYO ELECTRON LIMITED
0 cites