Patents/Inventors

Anthony Yen

HsinchuTW3 patents

3 Patents

US124297762025
Lithography Method with Reduced Impacts of Mask Defects
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119214342024
Mask Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117405632023
Mask Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites