6 Patents
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- US125735792026Hybrid Apparatus, System and Techniques for Mass Analyzed Ion Beam
Applied Materials, Inc.
0 cites - US119962662024Apparatus and Techniques for Substrate Processing Using Independent Ion Source and Radical Source
Applied Materials, Inc.
0 cites - US118624332024System and Methods Using an Inline Surface Engineering Source
Varlan Semiconductor Equipment Associates, Inc.
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