Patents/Inventors

Anthony R. Schepis

Albany, NYUS14 patents

13 Patents

US125663832026
Non-destructive Coupon Generation via Direct Write Lithography for Semiconductor Process Development
TOKYO ELECTRON LIMITED
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US125411552026
Coaxial See-through Inspection System
Tokyo Electron Limited
0 cites
US125059982025
Method for Chuck Compensation via Wafer Shape Control
Tokyo Electron Limited
0 cites
US124555112025
In-situ Lithography Pattern Enhancement with Localized Stress Treatment Tuning Using Heat Zones
Tokyo Electron Limited
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US123931252025
Coaxial See-through Inspection System
Tokyo Electron Limited
0 cites
US123946182025
Method of Adjusting Wafer Shape Using Multi-directional Actuation Films
Tokyo Electron Limited
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US123810932025
Hybrid Patterning-bonding Semiconductor Tool
Tokyo Electron Limited
0 cites
US123745622025
Wafer Shape Control for W2W Bonding
Tokyo Electron Limited
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US120011472024
Precision Multi-axis Photolithography Alignment Correction Using Stressor Film
Tokyo Electron Limited
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US117911672023
Cyclic Self-limiting Etch Process
Tokyo Electron Limited
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US117768082023
Planarization of Spin-on Films
TOKYO ELECTRON LIMITED
0 cites
US117215512023
Localized Stress Regions for Three-dimension Chiplet Formation
Tokyo Electron Limited
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US116886422023
Localized Stress Regions for Three-dimension Chiplet Formation
Tokyo Electron Limited
0 cites