Patents/Inventors

Anthony De La Llera

Fremont, CAUS4 patents

4 Patents

US125059912025
Tunability of Edge Plasma Density for Tilt Control
Lam Research Corporation
0 cites
US123879162025
Magnetic Field Control System
Lam Research Corporation
0 cites
US121397912024
Showerhead Faceplates with Angled Gas Distribution Passages for Semiconductor Processing Tools
Lam Research Corporation
0 cites
US115944002023
Multi Zone Gas Injection Upper Electrode System
Lam Research Corporation
0 cites