Patents/Inventors

Anthony Chih-tung Chan

Sunnyvale, CAUS4 patents

5 Patents

US123225732025
Pulsing Plasma Treatment for Film Densification
APPLIED MATERIALS, Inc.
0 cites
US121365442024
Etch Uniformity Improvement for Single Turn Internal Coil PVD Chamber
APPLIED MATERIALS, Inc.
0 cites
US121128902024
Top Magnets for Decreased Non-uniformity in PVD
Applied Materials, Inc.
0 cites
US118460132023
Methods and Apparatus for Extended Chamber for Through Silicon via Deposition
APPLIED MATERIALS, Inc.
0 cites
US115811662023
Low Profile Deposition Ring for Enhanced Life
APPLIED MATERIALS, Inc.
0 cites