9 Patents
- US124986342025System and Method for Generating Control Values for Overlay Control of an Imprint Tool
Canon Kabushiki Kaisha
0 cites - US124630812025Apparatus Including a Bonding Head and a Method of Using the Same
CANON KABUSHIKI KAISHA
0 cites - US123174212025Apparatus Including a Plurality of Heads and a Method of Using the Same
CANON KABUSHIKI KAISHA
0 cites - US122692822025Nanoimprint Lithography Template with Peripheral Pockets, System of Using the Template, and Method of Using the Template
CANON KABUSHIKI KAISHA
0 cites - US121533422024Nanofabrication Method with Correction of Distortion Within an Imprint System
Canon Kabushiki Kaisha
0 cites - 0 cites
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- US115674012023Nanofabrication Method with Correction of Distortion Within an Imprint System
Canon Kabushiki Kaisha
0 cites - 0 cites