10 Patents
- US122221992025Systems and Methods for Measurement of Misregistration and Amelioration Thereof
KLA Corporation
0 cites - US120136342024Reduction or Elimination of Pattern Placement Error in Metrology Measurements
KLA-TENCOR CORPORATION
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- US118625212024Multiple-tool Parameter Set Calibration and Misregistration Measurement System and Method
KLA CORPORATION
0 cites - 0 cites
- US117619692023System and Method for Analyzing a Sample with a Dynamic Recipe Based on Iterative Experimentation and Feedback
KLA Corporation
0 cites - 0 cites
- US116159742023Fab Management with Dynamic Sampling Plans, Optimized Wafer Measurement Paths and Optimized Wafer Transport, Using Quantum Computing
KLA CORPORATION
0 cites - 0 cites
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