5 Patents
- US124976922025Halogen Resistant Coatings and Methods of Making and Using Thereof
Applied Materials, Inc.
0 cites - 0 cites
- US119763572024Methods for Forming a Protective Coating on Processing Chamber Surfaces or Components
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- US116395472023Halogen Resistant Coatings and Methods of Making and Using Thereof
Applied Materials, Inc.
0 cites