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Anjana M. Patel
San Jose, CA
US
4 patents
4 Patents
US12488981
2025
Systems and Methods for Deposition Residue Control
Applied Materials, Inc.
0 cites
US11948790
2024
Heater Support Kit for Bevel Etch Chamber
APPLIED MATERIALS, Inc.
0 cites
US11699577
2023
Treatment for High-temperature Cleans
Applied Materials, Inc.
0 cites
US11560623
2023
Methods of Reducing Chamber Residues
Applied Materials, Inc.
0 cites