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Inventors
Anjan Prasad Gantapara
Veldhoven
NL
2 patents
2 Patents
US12591178
2026
Method for Adjusting a Patterning Process
ASML NETHERLANDS B.V.
0 cites
US12204298
2025
Methods of Modelling Systems for Performing Predictive Maintenance of Systems, Such as Lithographic Systems
ASML NETHERLANDS B.V.
0 cites