3 Patents
- US125867492026Certain Improvements of Multi-beam Generating and Multi-beam Deflecting Units
Carl Zeiss Multisem GmbH
0 cites - US125122912025Particle Beam System Having a Multi-pole Lens Sequence for Independently Focusing a Multiplicity of Individual Particle Beams, and Its Use and Associated Method
Carl Zeiss Multisem GmbH
0 cites - US122494782025Particle Beam System for Azimuthal Deflection of Individual Particle Beams and Method for Azimuth Correction in a Particle Beam System
Carl Zeiss Multisem GmbH
0 cites