3 Patents
- US123879052025Apparatus and Method for Detecting One or More Scanning Charged Particle Beams
DELMIC IP B.V.
0 cites - US123061212025Method and Apparatus for Inspecting a Sample by Means of Multiple Charged Particle Beamlets
DELMIC IP B.V.
0 cites - US121238412024Apparatus and Method for Projecting an Array of Multiple Charged Particle Beamlets on a Sample
DELMIC IP B.V.
0 cites