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Andrey Valerievich Rogachevskiy
Den Bosch
NL
3 patents
3 Patents
US12535314
2026
System and Method for Generating Level Data for a Surface of a Substrate
ASML Netherlands B.V.
0 cites
US12253807
2025
Height Measurement Method and Height Measurement System
ASML NETHERLANDS B.V.
0 cites
US11662669
2023
Apparatus and Method for Measuring Substrate Height
ASML Netherlands B.V.
0 cites