5 Patents
- US125657032026Atomic Layer Deposition and Vapor Deposition Reactor with In-chamber Microplasma Source
The Board Of Trustees Of The University Of Illinois
0 cites - US124364432025Light Generation and Distribution Methods and Systems for Disinfection, Medical Therapeutics, and Lighting
The Board Of Trustees Of The University Of Illinois
0 cites - US124244322025Ultraviolet and Vacuum Ultraviolet Lamps Driven by Molecular-atomic, Atomic-atomic, or Atomic-molecular Excitation Transfer
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
0 cites - US121745442024Photoresist-free Deposition and Patterning with Vacuum Ultraviolet Lamps
The Board Of Trustees Of The University Of Illinois
0 cites - 0 cites