Patents/Inventors

Andrey Evgenievich Stepanov

MoscowRU7 patents

6 Patents

US125384082026
Laser-sustained Plasma Generation in Supersonic Gas Jets
KLA Corporation
0 cites
US119786202024
Swirler for Laser-sustained Plasma Light Source with Reverse Vortex Flow
KLA Corporation
0 cites
US117768042023
Laser-sustained Plasma Light Source with Reverse Vortex Flow
KLA Corporation
0 cites
US116901622023
Laser-sustained Plasma Light Source with Gas Vortex Flow
KLA Corporation
0 cites
US116357002023
Method and Apparatus for EUV Mask Inspection
0 cites
US115960482023
Rotating Lamp for Laser-sustained Plasma Illumination Source
KLA Corporation
0 cites