Patents/Inventors

Andrew V. Hill

Sunriver, ORUS31 patents

19 Patents

US126019792026
Multi-column Large Field of View Imaging Platform
KLA Corporation
0 cites
US125852002026
Imaging Overlay with Mutually Coherent Oblique Illumination
KLA Corporation
0 cites
US125605482026
Spectral Angular Metrology
KLA Corporation
0 cites
US125608712026
Metrology Target for Scanning Metrology
KLA Corporation
0 cites
US125298782026
High Contrast Imaging in Bonded Sample Metrology Using Oblique Illumination
KLA Corporation
0 cites
US124875332025
Amplitude Asymmetry Measurements in Overlay Metrology
KLA Corporation
0 cites
US124223632025
Scanning Scatterometry Overlay Metrology
KLA Corporation
0 cites
US123796692025
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US122355882025
Scanning Overlay Metrology with High Signal to Noise Ratio
KLA Corporation
0 cites
US120663222024
Single Grab Overlay Measurement of Tall Targets
KLA Corporation
0 cites
US120323002024
Imaging Overlay with Mutually Coherent Oblique Illumination
KLA Corporation
0 cites
US120011482024
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites
US119337172024
Sensitive Optical Metrology in Scanning and Static Modes
KLA Corporation
0 cites
US118993752024
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US118525902023
Systems and Methods for Metrology with Layer-specific Illumination Spectra
KLA Corporation
0 cites
US118416212023
Moiré Scatterometry Overlay
KLA Corporation CA
0 cites
US118002122023
Multi-directional Overlay Metrology Using Multiple Illumination Parameters and Isolated Imaging
KLA Corporation
0 cites
US117195332023
Modulation of Scanning Velocity During Overlay Metrology
KLA Corporation
0 cites
US116625622023
Broadband Illumination Tuning
KLA Corporation
0 cites