Patents/Inventors

Andrew Judge

Monroe, CTUS2 patents

3 Patents

US123796552025
Contaminant Identification Metrology System, Lithographic Apparatus, and Methods Thereof
ASML Holding N.V.
0 cites
US119069072024
Apparatus and Method for Determining a Condition Associated with a Pellicle
ASML HOLDING N.V.
0 cites
US115502312023
Apparatus for and Method of In-situ Particle Removal in a Lithography Apparatus
ASML Holding N.V.
0 cites