5 Patents
- US125001142025Wafer Lift Pin Mechanism for Preventing Local Backside Deposition
LAM RESEARCH CORPORATION
0 cites - 0 cites
- US122665092025Multilayer Coatings of Component Parts for a Work Piece Processing Chamber
LAM RESEARH CORPORATION
0 cites - US122278372025Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites - US121632192024Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites