Andrew D. Bailey, III

4 Patents

• US125371782026

  Integrated Hardware-software Computer Vision System for Autonomous Control and Inspection of Substrate Processing Systems

  LAM RESEARCH CORPORATION

  0 cites
• US117044632023

  Method of Etch Model Calibration Using Optical Scatterometry

  Lam Research Corporation

  0 cites
• US116704862023

  Pulsed Plasma Chamber in Dual Chamber Configuration

  Lam Research Corporation

  0 cites
• US115944002023

  Multi Zone Gas Injection Upper Electrode System

  Lam Research Corporation

  0 cites