Patents/Inventors

Andrei V. Shchegrov

Campbell, CAUS13 patents

13 Patents

US123796692025
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US120929662024
Device Feature Specific Edge Placement Error (EPE)
KLA Corporation
0 cites
US120190302024
Methods and Systems for Targeted Monitoring of Semiconductor Measurement Quality
KLA Corporation
0 cites
US119903802024
Methods and Systems for Combining X-ray Metrology Data Sets to Improve Parameter Estimation
KLA Corporation
0 cites
US119138742024
Optical Metrology Tool Equipped with Modulated Illumination Sources
KLA Corporation
0 cites
US118993752024
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US118801422024
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US117963902023
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
KLA Corporation
0 cites
US117139592023
Overlay Metrology Using Spectroscopic Phase
KLA Corporation
0 cites
US116982512023
Methods and Systems for Overlay Measurement Based on Soft X-ray Scatterometry
KLA Corporation
0 cites
US116040632023
Self-calibrated Overlay Metrology Using a Skew Training Sample
KLA Corporation
0 cites
US116044202023
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US115622892023
Loosely-coupled Inspection and Metrology System for High-volume Production Process Monitoring
KLA Corporation
0 cites