Patents/Inventors

Anatoly Romanovsky

Palo Alto, CAUS3 patents

3 Patents

US125782852026
Gas Flow Configurations for Semiconductor Inspections
KLA Corporation
0 cites
US123456582025
Large-particle Monitoring with Laser Power Control for Defect Inspection
KLA CORPORATION
0 cites
US117331722023
Apparatus and Method for Rotating an Optical Objective
KLA Corporation
0 cites