Patents/Inventors

Anatoly Burov

Austin, TXUS5 patents

5 Patents

US125796312026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617902026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617912026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US124061972025
Prediction and Metrology of Stochastic Photoresist Thickness Defects
KLA Corporation
0 cites
US119661562024
Lithography Mask Repair by Simulation of Photoresist Thickness Evolution
KLA Corporation
0 cites