14 Patents
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US118813852024Methods and Apparatus for Reducing Defects in Preclean Chambers
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- US116705132023Apparatus and Systems for Substrate Processing for Lowering Contact Resistance
APPLIED MATERIALS, Inc.
0 cites - US116705252023Methods and Apparatus for Microwave Leakage Reduction for Semiconductor Process Chambers
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- US116300012023Apparatus for Measuring Temperature in a Vacuum and Microwave Environment
APPLIED MATERIALS, Inc.
0 cites