Patents/Inventors

Anantha K. Subramani

San Jose, CAUS11 patents

11 Patents

US125395302026
Throttle Valve and Foreline Cleaning Using a Microwave Source
Applied Materials, Inc.
0 cites
US121701862024
Showerhead Assembly with Heated Showerhead
APPLIED MATERIALS, Inc.
0 cites
US121424582024
Symmetric Plasma Source to Generate Pie-shaped Treatment
Applied Materials, Inc.
0 cites
US119823592024
Isolation Valve
Applied Materials, Inc.
0 cites
US119530972024
Isolation Valve
Applied Materials, Inc.
0 cites
US119461402024
Hot Showerhead
Applied Materials, Inc.
0 cites
US118307102023
Internally Divisible Process Chamber Using a Shutter Disk Assembly
APPLIED MATERIALS, Inc.
0 cites
US118238712023
Microwave Plasma Source for Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
Applied Materials, Inc.
0 cites
US118023402023
UHV In-situ Cryo-cool Chamber
APPLIED MATERIALS, Inc.
0 cites
US116004762023
Deposition System with Multi-cathode and Method of Manufacture Thereof
Applied Materials, Inc.
0 cites
US115453472023
Internally Divisible Process Chamber Using a Shutter Disk Assembly
APPLIED MATERIALS, Inc.
0 cites