Patents/Inventors

Anand Chandrashekar

Fremont, CAUS15 patents

13 Patents

US125312102026
Edge Exclusion Control
Lam Research Corporation
0 cites
US124761432025
Backside Reactive Inhibition Gas
Lam Research Corporation
0 cites
US124486862025
Reducing Line Bending During Metal Fill Process
Lam Research Corporation
0 cites
US124446512025
Tungsten Feature Fill with Nucleation Inhibition
Novellus Systems, Inc.
0 cites
US123946082025
Cleaning System for Removing Deposits from Pump in an Exhaust of a Substrate Processing System
LAM RESEARCH CORPORATION
0 cites
US123879792025
Tungsten Feature Fill with Nucleation Inhibition
Novellus Systems, Inc.
0 cites
US122610812025
Tungsten Feature Fill with Inhibition Control
Lam Research Corporation
0 cites
US122278372025
Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites
US121733992024
Reducing Line Bending During Metal Fill Process
Lam Research Corporation
0 cites
US121632192024
Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites
US120026792024
High Step Coverage Tungsten Deposition
Lam Research Corporation
0 cites
US119786662024
Void Free Low Stress Fill
Lam Research Corporation
0 cites
US119012272024
Feature Fill with Nucleation Inhibition
Lam Research Corporation
0 cites