6 Patents
- US125357432026Radiation Source Arrangement and Metrology Device0 cites
- US123993132025Hollow-core Fiber Based Broadband Radiation Generator with Extended Fiber Lifetime
ASML NETHERLANDS
0 cites - US121970012025Hollow Core Fiber Light Source and a Method for Manufacturing a Hollow Core Fiber
ASML NETHERLANDS B.V.
0 cites - 0 cites
- US117526622023Process and Device for Preparing a 3-dimensional Body, in Particular a Green Body
Max-planck-gesellschaft Zur Foerderung Der Wissenschaften E.v.
0 cites - US116998892023Hollow-core Photonic Crystal Fiber Based Optical Component for Broadband Radiation Generation
ASME NETHERLANDS B.V.
0 cites