Patents/Inventors

Alok Verma

EindhovenNL5 patents

5 Patents

US123226602025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US121425352024
Method and Apparatus to Determine a Patterning Process Parameter Using a Unit Cell Having Geometric Symmetry
ASML NETHERLANDS B.V.
0 cites
US117840982023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117282242023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117106682023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites