Allard Eelco Kooiker

4 Patents

• US120280002024

  Object Table Comprising an Electrostatic Clamp

  ASML Netherlands B.V.

  0 cites
• US119086562024

  Stage Apparatus Suitable for a Particle Beam Apparatus

  ASML Netherlands B.V.

  0 cites
• US117640302023

  Stage Apparatus Suitable for Electron Beam Inspection Apparatus

  ASML Netherlands B.V.

  0 cites
• US116375122023

  Object Table Comprising an Electrostatic Clamp

  ASML Netherlands B.V.

  0 cites