Patents/Inventors

Alexey Olegovich Polyakov

VeldhovenNL4 patents

5 Patents

US123994282025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US123259112025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US123139802025
Inspection System, Lithographic Apparatus, and Inspection Method
ASML NETHERLANDS B.V.
0 cites
US122710082025
Transmissive Diffusor
ASML NETHERLANDS B.V.
0 cites
US119962672024
Particle Beam Apparatus, Defect Repair Method, Lithographic Exposure Process and Lithographic System
ASML NETHERLANDS B.V.
0 cites