17 Patents
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- US124760822025Radiofrequency Signal Filter Arrangement for Plasma Processing System
Lam Research Corporation
0 cites - US124127362025Methods and Systems for Managing Byproduct Material Accumulation During Plasma-based Semiconductor Wafer Fabrication Process
Lam Research Corporation
0 cites - US123548402025Systems and Methods for Optimizing Power Delivery to an Electrode of a Plasma Chamber
Lam Research Corporation
0 cites - US123409892025Electrostatic Edge Ring Mounting System for Substrate Processing
Lam Research Corporation
0 cites - US123082112025Systems and Methods for Use of Low Frequency Harmonics in Bias Radiofrequency Supply to Control Uniformity of Plasma Process Results Across Substrate
Lam Research Corporation
0 cites - US122665052025Systems and Methods for Using Binning to Increase Power During a Low Frequency Cycle
Lam Research Corporation
0 cites - US122550522025Process Control for Ion Energy Delivery Using Multiple Generators and Phase Control
Lam Research Corporation
0 cites - US121835442024Tuning Voltage Setpoint in a Pulsed RF Signal for a Tunable Edge Sheath System
Lam Research Corporation
0 cites - US121318862024Systems and Methods for Extracting Process Control Information from Radiofrequency Supply System of Plasma Processing System
Lam Research Corporation
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- US119086602024Systems and Methods for Optimizing Power Delivery to an Electrode of a Plasma Chamber
Lam Research Corporation
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- US116519912023Electrostatic Chuck Design for Cooling-gas Light-up Prevention
Lam Research Corporation
0 cites - 0 cites