Patents/Inventors

Alexei M. Marakhtanov

Albany, CAUS2 patents

3 Patents

US123879092025
Low Frequency RF Generator and Associated Electrostatic Chuck
Lam Research Corporation
0 cites
US123621592025
Systems and Methods for Controlling a Plasma Sheath Characteristic
Lam Research Corporation
0 cites
US121658442024
Uniformity Control Circuit for Impedance Match
Lam Research Corporation
0 cites