5 Patents
- US124182732025Electromechanical Device with Adjustable Resonance Frequency
COMMISSARIAT à L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
0 cites - US123162952025Method of Fabricating Layers of Single-crystal Material
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
0 cites - US117058802023Process for Producing a Micro-electro-mechanical System from a Transferred Piezoelectric or Ferroelectric Layer
ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
0 cites - US116011072023Method for the Production of a Bulk Acoustic Wave Resonator with a Reduced Parasitic Capacitance
COMMISSARIAT A L'ENERGIE ATOMIQUE ETAUX ENERGIES ALTERNATIVES
0 cites - 0 cites