Patents/Inventors

Alexander Miller Paterson

San Jose, CAUS11 patents

11 Patents

US125735892026
Synchronization of RF Generators
Lam Research Corporation
0 cites
US124943452025
Pulsing RF Coils of a Plasma Chamber in Reverse Synchronization
Lam Research Corporation
0 cites
US124826342025
Symmetric Coupling of Coil to Direct-drive Radiofrequency Power Supplies
Lam Research Corporation
0 cites
US123974352025
Substrate Location Detection and Adjustment
Lam Research Corporation
0 cites
US123225792025
Metal Contamination Reduction in Substrate Processing Systems with Transformer Coupled Plasma
Lam Research Corporation
0 cites
US122610292025
Protection System for Switches in Direct Drive Circuits of Substrate Processing Systems
Lam Research Corporation
0 cites
US121658412024
Dual-frequency, Direct-drive Inductively Coupled Plasma Source
Lam Research Corporation
0 cites
US121192322024
Etching Isolation Features and Dense Features Within a Substrate
Lam Research Corporation
0 cites
US120464502024
Synchronization of RF Generators
Lam Research Corporation
0 cites
US118878192024
Systems for Cooling RF Heated Chamber Components
Lam Research Corporation
0 cites
US117281372023
Direct Frequency Tuning for Matchless Plasma Source in Substrate Processing Systems
Lam Research Corporation
0 cites