Alexander Matyushkin

7 Patents

• US123879092025

  Low Frequency RF Generator and Associated Electrostatic Chuck

  Lam Research Corporation

  0 cites
• US123811052025

  Coolant Channel with Internal Fins for Substrate Processing Pedestals

  LAM RESEARCH CORPORATION

  0 cites
• US123409892025

  Electrostatic Edge Ring Mounting System for Substrate Processing

  Lam Research Corporation

  0 cites
• US122372012025

  Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns

  Lam Research Corporation

  0 cites
• US119423512024

  Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns

  Lam Research Corporation

  0 cites
• US116642622023

  Electrostatic Chucks with Coolant Gas Zones and Corresponding Groove and Monopolar Electrostatic Clamping Electrode Patterns

  Lam Research Corporation

  0 cites
• US116519912023

  Electrostatic Chuck Design for Cooling-gas Light-up Prevention

  Lam Research Corporation

  0 cites