Patents/Inventors

Alexander Ludwig Klein

EindhovenNL2 patents

3 Patents

US123395882025
High Force Low Voltage Piezoelectric Micromirror Actuator
ASML Netherlands B.V.
0 cites
US123259112025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US120726202024
Method of Manufacturing a Membrane Assembly
ASML NETHERLANDS B.V.
0 cites