Patents/Inventors

Alexander Kuznetsov

Austin, TXUS4 patents

6 Patents

US120255752024
Soft X-ray Optics with Improved Filtering
KLA Corporation
0 cites
US118801422024
Self-calibrating Overlay Metrology
KLA Corporation
0 cites
US117963902023
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
KLA Corporation
0 cites
US116982512023
Methods and Systems for Overlay Measurement Based on Soft X-ray Scatterometry
KLA Corporation
0 cites
US116040632023
Self-calibrated Overlay Metrology Using a Skew Training Sample
KLA Corporation
0 cites
US116044202023
Self-calibrating Overlay Metrology
KLA Corporation
0 cites