Patents/Inventors

Alexander Krupyshev

Chelmsford, MAUS6 patents

7 Patents

US123005282025
Substrate Transport Apparatus
Brooks Automation US, LLC
0 cites
US121425112024
Substrate Processing Apparatus
Brooks Automation US, LLC
0 cites
US118942522024
Substrate Transport Apparatus
Brooks Automation US, LLC
0 cites
US117640932023
Automatic Wafer Centering Method and Apparatus
Brooks Automation US, LLC
0 cites
US116107872023
Load Lock Fast Pump Vent
Brooks Automation US, LLC
0 cites
US115878132023
Substrate Transport Apparatus
Brooks Automation US, LLC
0 cites
US115691112023
Substrate Processing Apparatus
Brooks Automation US, LLC
0 cites