Patents/Inventors

Alexander Igorevich Ershov

Escondido, CAUS5 patents

6 Patents

US124529862025
Nozzle Apparatus
ASML Netherlands B.V.
0 cites
US123895192025
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites
US122220502025
Robust Fluid Coupling Apparatus
ASML Netherlands B.V.
0 cites
US118468872023
Prolonging Optical Element Lifetime in an EUV Lithography System
ASML Netherlands B.V.
0 cites
US118222522023
Guiding Device and Associated System
ASML NETHERLANDS B.V.
0 cites
US116901592023
Apparatus and Method for Extending Target Material Delivery System Lifetime
ASML Netherlands B.V.
0 cites