Patents/Inventors

Alex Paterson

San Jose, CAUS17 patents

17 Patents

US125073382025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
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US124903702025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US124841392025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
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US124712022025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
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US124379662025
Systems and Methods for Reverse Pulsing
Lam Research Corporation
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US124244102025
RF Pulsing Within Pulsing for Semiconductor RF Plasma Processing
Lam Research Corporation
0 cites
US122834612025
Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
Lam Research Corporation
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US121931382025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US120681312024
Multi-level Parameter and Frequency Pulsing with a Low Angular Spread
Lam Research Corporation
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US120274102024
Edge Ring Arrangement with Moveable Edge Rings
Lam Research Corporation
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US119159122024
Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
Lam Research Corporation
0 cites
US117987852023
Systems for Reverse Pulsing
Lam Research Corporation
0 cites
US117281362023
RF Pulsing Within Pulsing for Semiconductor RF Plasma Processing
Lam Research Corporation
0 cites
US117168052023
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US116927322023
Air Cooled Faraday Shield and Methods for Using the Same
Lam Research Corporation
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US116055462023
Moveable Edge Coupling Ring for Edge Process Control During Semiconductor Wafer Processing
Lam Research Corporation
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US115690672023
Systems and Methods for Achieving Peak Ion Energy Enhancement with a Low Angular Spread
Lam Research Corporation
0 cites