Alan V. Hayes

3 Patents

• US124068332025

  Ion Extraction Optics Having Non Uniform Grid Assembly

  Applied Materials, Inc.

  0 cites
• US122494882025

  Plasma Shaper to Control Ion Flux Distribution of Plasma Source

  Applied Materials, Inc.

  0 cites
• US121256802024

  Ion Extraction Assembly Having Variable Electrode Thickness for Beam Uniformity Control

  Applied Materials, Inc.

  0 cites