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Alan Tso
San Jose, CA
US
2 patents
3 Patents
US12148597
2024
Multi-zone Gas Distribution Systems and Methods
Applied Materials, Inc.
0 cites
US11637002
2023
Methods and Systems to Enhance Process Uniformity
Applied Materials, Inc.
0 cites
US11581165
2023
Multi-zone Gas Distribution Systems and Methods
Applied Materials, Inc.
0 cites