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Inventors
Alan Cuthbertson
San Jose, CA
US
12 patents
12 Patents
US12479718
2025
Actuator Layer Patterning with Topography
Invensense, Inc.
0 cites
US12466726
2025
Method and System for Fabricating a MEMS Device Cap
Invensense, Inc.
0 cites
US12258266
2025
Method and System for Fabricating a MEMS Device
Invensense, Inc.
0 cites
US12180069
2024
Method and System for Fabricating a MEMS Device
Invensense, Inc.
0 cites
US12139397
2024
Selective Self-assembled Monolayer Patterning with Sacrificial Layer for Devices
INVENSENSE, Inc.
0 cites
US11952267
2024
Modification to Rough Polysilicon Using Ion Implantation and Silicide
INVENSENSE, Inc.
0 cites
US11919769
2024
Sensor with Dimple Features and Improved Out-of-plane Stiction
Invensense, Inc.
0 cites
US11905170
2024
MEMS Tab Removal Process
Invensense, Inc.
0 cites
US11731871
2023
Actuator Layer Patterning with Polysilicon and Etch Stop Layer
Invensense, Inc.
0 cites
US11661332
2023
Stiction Reduction System and Method Thereof
Invensense, Inc.
0 cites
US11618674
2023
Actuator Layer Patterning with Topography
Invensense, Inc.
0 cites
US11542154
2023
Sensor with Dimple Features and Improved Out-of-plane Stiction
Invensense, Inc.
0 cites