6 Patents
- US123984692025Methods and Systems for Producing Conformal Thin Films
KALARK NANOSTRUCTURE SCIENCES Inc.
0 cites - 0 cites
- US123449342025Silicon-based Thin Films from N-alkyl Substituted Perhydridocyclotrisilazanes
GELEST, Inc.
0 cites - US120657372024Silicon-based Thin Films from N-alkyl Substituted Perhydridocyclotrisilazanes
GELEST, Inc.
0 cites - 0 cites
- US116348112023Process for Thin Film Deposition Through Controlled Formation of Vapor Phase Transient Species
GELEST, Inc.
0 cites