Akshay Gunaji

4 Patents

• US120402102024

  Multi-pressure Bipolar Electrostatic Chucking

  Applied Materials, Inc.

  0 cites
• US120209572024

  Heater Assembly with Process Gap Control for Batch Processing Chambers

  Applied Materials, Inc.

  0 cites
• US119503842024

  Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers

  APPLIED MATERIALS, Inc.

  0 cites
• US116020642023

  Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers

  APPLIED MATERIALS, Inc.

  0 cites