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Inventors
Akshay Dhanakshirur
Hubli
IN
7 patents
7 Patents
US12562355
2026
Isolator for Processing Chambers
Applied Materials, Inc.
0 cites
US12460298
2025
Showerhead Design to Control Stray Deposition
Applied Materials, Inc.
0 cites
US12338530
2025
Shaped Showerhead for Edge Plasma Modulation
Applied Materials, Inc.
0 cites
US11984302
2024
Magnetic-material Shield Around Plasma Chambers Near Pedestal
Applied Materials, Inc.
0 cites
US11959174
2024
Shunt Door for Magnets in Plasma Process Chamber
Applied Materials, Inc.
0 cites
US11929278
2024
Low Impedance Current Path for Edge Non-uniformity Tuning
Applied Materials, Inc.
0 cites
US11869795
2024
Mesa Height Modulation for Thickness Correction
Applied Materials, Inc.
0 cites