2 Patents
- US117809462023Alternating Copolymer, Method of Producing Alternating Copolymer, Method of Producing Polymeric Compound, and Method of Forming Resist Pattern
TOKYO OHKA KOGYO CO., Ltd.
0 cites - US115604442023Method of Producing Block Copolymer Capable of Creating Specific Structure Pattern
TOKYO INSTITUTE OF TECHNOLOGY
0 cites